ƒ_ƒCƒ„ƒ‚ƒ“ƒh\‘¢‚Å‚ ‚éAƒJ[ƒ{ƒ“‚ÌSP3\‘¢‚ðA90%•Û—L‚·‚éDLC
AC-X
DLC-EX
i“–ŽÐ•W€–Œj
d“xHv
7000HvA60Gpa
3000HvA20Gpa
‘Ï”M‰·“x
550Ž
400Ž
–Œ@Œú
`0.7ƒÊm
0.1`1.0ƒÊm
ˆ—‰·“x
150Ž
250Ž
–Ê‘e‚³(Ra)
4nm
10nm